摘要
为了解决柔性压力传感器在大的工作范围内工作时难以兼顾灵敏度的问题,设计了一种基于聚二甲基硅氧烷(PDMS)锥形微结构且夹层为石墨烯泡沫的柔性压力传感器。介绍了该传感器的制备方法,对比了有无锥形微结构的PDMS基底对传感器灵敏度的影响,分别对它们进行了相关测试。结果表明,具有锥形微结构基底的传感器具有更高的灵敏度,基于锥形微结构PDMS-石墨烯泡沫压力传感器有较大的工作范围(0~25 kPa),灵敏度为0.177 kPa^(-1),几百次的压力实验表明该传感器的重复性和可恢复性良好。因此,该传感器可以应用于电子皮肤和柔性电子器件等领域。
To solve the problem that it is difficult for the flexible pressure sensor to have high sensitivity in a large working range, a flexible pressure sensor based on the polydimethylsiloxane(PDMS) conical microstructure with a graphene foam interlayer was designed. The preparation method of the sensor was introduced. The influences of the PDMS substrates with and without the conical microstructure on the sensitivity of the sensors were compared, and the relevant tests of the sensors were carried out, respectively. The results show that the sensor with the conical microstructure substrate has higher sensitivity. The pressure sensor with the conical microstructure based on PDMS-graphene foam has a large working range(0-25 kPa), and the sensitivity is 0.177 kPa^(-1). Hundreds of pressure experiments show that the repeatability and recoverability of the sensor are good. Thus, the sensor can be applied in the fields of electronic skin and flexible electronic devices.
作者
程丽霞
郝晓剑
王任鑫
刘国昌
Cheng Lixia;Hao Xiaojian;Wang Renxin;Liu Guochang(State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Department of Mechanical Engineering,Taiyuan Institute of Technology,Taiyuan 030008,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第5期397-402,共6页
Micronanoelectronic Technology
基金
国家自然科学基金面上资助项目(61473267)
山西省自然科学基金资助项目(201901D111162)
山西省回国留学人员科研资助项目(2017-098)。
