摘要
研究了金属-氧化物异质材料纳米连接过程中的飞秒激光能量输入特征,实现了纳米材料快速低损伤互连的同时,保证了器件功能的完整性。研究了纳米连接对Pt-TiO_(2)跨尺度互连结构电学性能调控的影响。实验结果表明:当入射光能量密度为5.02 mJ/cm^(2)时,纳米线与电极接触区域形成具有稳定结合强度的互连接头。模拟结果显示,飞秒激光辐照一侧产生局部“热点”,增强了接头区域的光学吸收。互连接头的形成,降低了异质界面的接触势垒。同时,基于互连结构模拟神经元突触传递,实现了更加稳定的电学性能调控。
Objective With manufacturing being downsized to the nanoscale,the welding and joining of nanoscale materials(“nanowelding”for short)has become key in the integration of advanced nanodevice fabrication and packaging.As a bottom-up process,nanowelding can flexibly combine nanostructures with different chemical compositions and selectively modify the interfaces of semiconductor heterojunctions in order to obtain complex electrical and optical properties.In recent years,although the research on nanowelding has made significant progress,the basic theory of low-damage joining of heterojunctions at the nanoscale has not been well-established.Femtosecond(fs)laser is now widely used in the precision machining of materials with high melting point or high damage threshold due to its unique“cold”processing characteristics.In particular,optical irradiation-induced surface plasmonic effect on the metal-dielectric interface can affect the energy redistribution in the nanostructures,which is beneficial for heterogeneous interface modification of semiconductors at the nanoscale.In this study,the nanowelding process of Pt electrodes and TiO_(2)nanowires under localized fs laser irradiation has been reported.The creation of this welded structure shows good performance of the synaptic response,which indicates a new method to realize the modification of a metal-oxide heterointerface.Methods Pt/Ti(the thick is 200 nm/5 nm)electrodes with special finger spacing were fabricated by optical lithography and lift-off processes on oxidized Si substrate.TiO_(2)nanowires with pure rutile phase were synthesized by a hydrothermal process,dispersed and diluted in a high-purity acetone solution,which was then drop-cast on the chip with Pt electrodes.The fs laser beam,with 50 fs pulse duration,800 nm wavelength,and 1 kHz frequency,was generated from a Ti:sapphire laser system and focused by an objective lens with a numerical aperture of 0.5 at a nanoscale spot overlapping a small portion of the nanowire at the junction.COMSOL Multiphysics v
作者
邢松龄
肖宇
霍金鹏
林路禅
沈道智
刘磊
Xing Songling;Xiao Yu;Huo Jinpeng;Lin Luchan;Shen Daozhi;Liu Lei(Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2021年第8期51-58,共8页
Chinese Journal of Lasers
基金
国家重点研发计划(2017YFB1104900)
国家自然科学基金(51775299,52075287,51520105007)。
关键词
激光技术
纳米连接
飞秒激光
忆阻器
突触可塑性
二氧化钛纳米线
laser technique
nanowelding and nanojoining
femtosecond laser
memristor
synaptic plasticity
TiO_(2) nanowire
