摘要
在陀螺仪中,微电容检测系统的精度直接决定了转子位移测量精度,进而影响了陀螺的精度。为适应高精度转子陀螺的特殊结构,该文研制了一种基于环形二极管解调的微电容检测系统。研究了该系统输出增益变化规律,提出了基于漏电最小化原则的增益解算算法;研究了输出噪声的特性,并设计了相应的噪声解算算法;在此基础上,提出一种基于环形二极管解调的新型微电容检测方法,抑制噪声以提高电容检测分辨率。实验结果表明:优化电路后的电容分辨率达到20.0 aF,单位带宽下的分辨率达到0.258 aF·Hz^(-1/2),满足电容测量的精度需求。
The accuracy of micro-capacitance detection systems in gyroscopes directly determines the rotor displacement measurement accuracy,which in turn determines the overall accuracy of the gyroscope.A micro-capacitance detector was developed in this study based on ring-diode demodulation for the special structure of a spinning-rotor gyro.The system output gain variations were studied to develop a gain algorithm based on the leakage minimization principle with a noise reduction algorithm to reduce the output noise.This micro-capacitance detection method based on ring diodes reduces the noise which improves the capacitance detection resolution.Tests show that the optimized circuit gives a capacitance resolution of better than 20.0 aF and a resolution at the unit bandwidth of better than 0.258 aF·Hz^(-1/2)which is excellent capacitance measurement accuracy.
作者
周晓桐
张嵘
ZHOU Xiaotong;ZHANG Rong(Department of Precision Instrument,Tsinghua University,Beijing 100084,China)
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2021年第6期653-658,共6页
Journal of Tsinghua University(Science and Technology)
关键词
微电容检测
环形二极管
“漏电最小化”原则
电容检测分辨率
micro-capacitance detection
ring diodes
leakage minimization principle
capacitance detection resolution
