摘要
结合目前半导体特性测试仪校准时依据的技术文件,总结分析实际校准过程中的经验和问题,对4200型半导体特性测试仪的校准方法进行了研究,并对其直流电流测量结果的不确定度进行了评定。
Based on the technical documents of current semiconductor characteristic tester calibration,the experience and problems in the actual calibration process are summarized and analyzed.The calibration method of 4200 semiconductor characteristic tester is studied,and the uncertainty of DC current measurement result is evaluated.
作者
石竹君
林宏
刘成
Shi Zhujun;Lin Hong;Liu Cheng(Guizhou Aerospace Research Institute of Metrology and Testing Technology,Guiyang Guizhou 550009)
出处
《现代工业经济和信息化》
2021年第4期151-152,154,共3页
Modern Industrial Economy and Informationization
