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超声处理对建筑用EVM表面离子镀DLC涂层组织和摩擦性的影响

Synthesis and Tribological Properties of Diamond-Like-Carbon Coatings on EVM Substrate
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摘要 通过超声方法处理聚氨基甲酸酯表面,选择脉冲碳离子源,结合阴极放电等离子方法在EVM表面完成DLC涂层的沉积过程,对超声处理过程中温度与时间参数引起的DLC涂层摩擦特性改变进行分析。实验测试研究结果表明:当超声处理的时间延长或者温度升高后,在试样表面形成了更深的条纹,能够显著增强EVM表面发生溶解的能力。DLC涂层在拉曼光谱测试过程中都形成低波数区间中的肩部结构,可以推断其光谱曲线都包含了D峰与G峰,在DLC膜内形成了跟高比例的石墨相。DLC涂层后的表面相对于EVM发生了摩擦系数稳定性下降,该结果表明DLC涂层可以使EVM获得更优耐磨性。当超声温度升高以及时间延长后,试样先发生摩擦系数的略微减小,之后发生逐渐升高。进行超声超声后,试样发生了磨损量的大幅降低,可以获得更致密的DLC涂层。 The surfaces of EVM,a dynamic sealing rubber,were modified with diamond-like-carbon(DLC) coatings synthesized in the glow discharge plasma deposition reactor equipped with pulsed carbon ion source.The original work was that the EVM substrate was pre-irradiated with ultrasonic wave.The influence of the ultrasonic irradiation temperature and time on the microstructures,phase-structures and tribological behavior of the DLC coating was investigated with scanning electron microscopy,Raman spectroscopy and conventional mechanical probes.The preliminary results show that the ultrasonic irradiation had a major impact.For instance,the DLC coating,comprising a fairly high content of graphite-phase,considerably increased the hardness and decreased the friction coefficient;and as the irradiation temperature and time increased,the friction coefficient of the increasing compact DLC coatings changed in a decrease-increase mode,accompanied by a significantly decreasing wear-rate.
作者 陈剑红 武晓东 陈梦娇 CHEN Jianhong;WU Xiaodong;CHEN Mengjiao(Chengdu Polytechnic University,Chengdu 610041,China;Sixth Design and Research Institute of Mechanical Industry co.,LTD.,Zhengzhou 460007,China;Henan University,Kaifeng 476000,China)
出处 《真空科学与技术学报》 CAS CSCD 北大核心 2021年第2期168-173,共6页 Chinese Journal of Vacuum Science and Technology
基金 河南省科技攻关项目(182102310830)。
关键词 DLC EVM 超声处理 微观组织 耐磨性 DLC EVM entry Ultrasonic processing Microorganization Wear resistance
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