摘要
提出了基于光学相干测振(optical coherence vibrometer,OCV)系统的微悬臂梁缺陷检测方法。自搭建的OCV系统最大振动位移量程、最大振动频率分别为2.574 mm和138.5 kHz,应用该系统对含缺陷微悬臂梁-附加质量块耦合结构进行振动测量获得其固有频率,并利用附加质量块对固有频率的影响特性实现了对缺陷的定位。在对系统采集到的干涉光谱信号处理的过程中,采用FFT(fast Fourier transform,FFT)+FT(Fourier transform,FT)细化频谱校正算法进行误差校正,精度可提高1000倍以上,使系统实现纳米量级的位移测量。实验结果表明,该方法能够有效识别微悬臂梁的缺陷位置,为微小型结构的缺陷检测提供了一种新的方法,同时拓展了光学相干测振技术在工程结构无损检测的应用。
An defect detection method of micro-cantilever beams based on optical coherence vibrometer(OCV)system was proposed.The maximum vibration displacement measuring range and vibration frequency of the home-made OCV system were 2.574 mm and 138.5 kHz,respectively.This system was used to carry out the vibration measurement of the defective micro-cantilever beams with additional mass-block coupled structure,and its natural frequencies were obtained.Subsequently,the defect location was realized by using the influencing characteristic of the additional mass-block on natural frequencies.In the process of processing the interference spectrum signals collected by the system,the fast Fourier transform(FFT)and Fourier transform(FT)refinement spectrum correction algorithm was utilized for error correction,and the accuracy could be increased by more than 1000 times,which enabled the system to realize the displacement measurement at nanometer scale.The experimental results show that this method can identify the defect location of microcantilever beams effectively,which provides a new method for the defect detection of micro structures and expands the application of optical coherence vibrometer technology in nondestructive testing of engineering structures.
作者
贾美英
钟舜聪
周宁
林杰文
张秋坤
JIA Meiying;ZHONG Shuncong;ZHOU Ning;LIN Jiewen;ZHANG Qiukun(School of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350108,China;Key Laboratory of Medical Instrumentation and Pharmaceutical Technology,Fuzhou University,Fuzhou 350108,China)
出处
《应用光学》
CAS
CSCD
北大核心
2021年第2期304-309,共6页
Journal of Applied Optics
基金
国家自然科学基金(51675103)
福建省科技计划项目(2019I0004)。
关键词
光学相干测振
微悬臂梁
缺陷检测
频谱校正
附加质量
optical coherence vibrometer
micro-cantilever beams
defect detection
spectrum correction
additional mass
