摘要
采用简单的化学气相沉积(CVD)方法,利用氧化镓粉末和碳粉作为生长的原材料,在无金属催化剂的情况下,在硅衬底上生长出了产量高、面积大、而且尺寸均一的β-Ga_(2)O_(3)纳米球,并研究不同生长温度对β-Ga_(2)O_(3)表面形貌和晶体结构的影响。通过实验分析表明,随着生长温度的升高,衬底上纳米球的数量出现了明显的增多,而且分布变得更加致密,纳米球的直径范围约为200~700 nm。另外,研究还发现样品X射线衍射图谱中(002)衍射峰的半高全宽(FWHM)随着生长温度的升高而变小,结合扫描电子显微镜(SEM)的结果可以得出利用CVD方法制备β-Ga_(2)O_(3)纳米球的最佳生长温度为1200℃。
β-Ga_(2)O_(3)nanospheres with high yield,large area and uniform sizes were grown from gallium oxide powder and carbon powder by chemical vapor deposition method without any catalyst.The influence of growth temperature on the morphology,crystal quality and optical properties of the samples were investigated.The experimental results showed that with increasing growth temperature,the number ofβ-Ga_(2)O_(3)nanospheres was obviously increased and the distribution was very dense.The diameter of nanospheres was about 200~700 nm.In addition,the full width at half maximum of the(002)diffraction peak of the sample was decreased with increasing growth temperature.Combined with the SEM results,it was concluded that the optimum growth temperature of theβ-Ga_(2)O_(3)nanospheres in the experiment was 1200℃.
作者
冯秋菊
王德煜
高冲
张建平
李芳
董增杰
解金珠
FENG Qiuju;WANG Deyu;GAO Chong;ZHANG Jianping;LI Fang;DONG Zengjie;XIE Jinzhu(College of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China)
出处
《大学物理实验》
2020年第6期43-46,共4页
Physical Experiment of College
基金
辽宁省自然科学基金(2020-MS-243)
2020年辽宁师范大学教师指导本科生科研训练项目(CX202002072)。
