摘要
本文报道了在自动控制直径条件下大尺寸YVO_(4)晶体的提拉法生长研究。利用改进的上称重法生长大尺寸YVO_(4)晶体,在提拉法单晶生长过程中,晶体扩肩部分采用斜率积分模式,转肩部分采用斜率积分过渡到直径积分模式,等径部分采用直径积分模式,应用这种分段控制方式成功地实现了YVO_(4)晶体的自动化生长。采用4台50型自动化生长炉对YVO_(4)晶体自动化生长工艺进行了长达一年的可靠性验证,预设技术目标为晶体直径大于40 mm,等径部分长度大于30 mm,B级晶体质量达80%以上,采用自动控制方法生长晶体毛坯共计138个,晶体直径达标率为99.3%,等径部分长度达标率为53.6%,晶体生长良品率为88.4%。本文还讨论了影响晶体等径部分长度达标率的若干工艺因素。
This paper presents a research on the Czochralski growth of large size YVO_(4)crystal with autocontrolled diameter.The large size YVO_(4)single crystal was successfully grown by the Czochralski process with modified up-weighing method.In the Czochralski growth process of large size YVO_(4)crystals,the slope integral mode was used in the shoulder expanding part,transition from slope integration to diameter integration mode was used in the shoulder turning part,and the diameter integral mode was used in the growth of the equal diameter part.The automatic growth of YVO_(4)crystal has been realized by the subsection controlling procedure described above.The reliability of the automatic growth process of YVO_(4)crystal was verified with four 50 mode automatic furnaces in a duration of one year.The technical goal of grown crystals was preset as follows:a crystal diameter of more than 40 mm,a length with the equal diameter part of more than 30 mm,and more than 80%production of B-grade quality crystals.A total of 138 crystal boules were grown by the Czochralski process with autocontrolling mode.The statistic data was summerized as 99.3%crystal boules with the standard diameter,53.6%crystal boules with the standard length,and 88.4%yield of crystal growth.The technological factors concerning of the yield of crystal boules with the standard length of equal diameter part were also discussed.
作者
曾宪林
陈伟
张星
陈秋华
ZENG Xianlin;CHEN Wei;ZHANG Xing;CHEN Qiuhua(Fujian CASTECH, Fuzhou 350003, China)
出处
《人工晶体学报》
CAS
北大核心
2021年第2期248-252,共5页
Journal of Synthetic Crystals
