摘要
Suppression of stress and crack generation during picosecond laser processing in transparent brittle materials such as glass was successfully demonstrated by a picosecond laser pulse with temporal energy modulation.The origin of deterioration in processing accuracy could be interpreted in terms of the discontinuous movement of plasma in the vicinity of the focus.To reveal the effectiveness of the temporal energy modulation for smootli machining,such plasma motion was simulated by the fiidtc-d ifference time-domain method.F urt her more,photoinduced birefringence was observed using a high-speed polarization camera.
基金
by JSPS KAKENHI(Nos.JP17H03040 and 20H02656).
