摘要
微组装在微纳机电系统集成、柔性可拉伸电路及微型传感器制造等领域占据重要地位,然而,在微纳尺度下,由于尺度效应,重力不再起决定性作用,与面积相关的力占据主导地位,导致微器件难以释放及精准定位.提出一种结合机器人微组装与表面张力自组装技术的复合微组装方法,采用机器人微组装技术完成芯片的快速初次定位,利用表面张力自组装技术实现微芯片与基底之间的高精度自对齐.建立了表面张力自组装的仿真模型,研究了芯片与基底之间的错动量、液滴体积对液桥表面自由能和自组装恢复力的影响,结果表明液桥表面自由能及自组装恢复力随错动量和液滴体积的增加而变大.通过实验研究了液滴体积、芯片与基底之间的错动量对自组装成功率和自组装时间的影响,结果表明当错动量在50~500μm范围内,液滴体积在30~110 nL范围内时,自组装成功率可达100%.该方法结合了高速机器人微组装技术以及高精度表面张力自组装技术的优势,为同时实现高效、高精度的微机电系统集成及柔性电路制造等应用领域提供了新方法.
Micro-assembly plays an important role in the integration of MEMS,stretchable electronics,and microsensors.However,in micro and nano world,due to the scaling law,the body force such as gravity is not dominant anymore,instead,surface forces such as surface tension and Van der Waals forces become more dominant,which causes a big challenge for micro-assembly,especially for releasing of micro parts.This paper proposes a hybrid micro-assembly method which combines the robotic micro-assembly technique and the surface tension driven self-alignment technique.The robotic micro-assembly technique is used to achieve fast positioning and surface tension driven self-alignment technique is used to achieve high precision alignment.A theoretical model is developed to estimate the surface energy and surface tension for self-alignment.The influence of the displacement bias and droplet volume on the surface free energy and surface tension are investigated using the model.The results show that the surface free energy and surface tension force increase as the volume of the droplet and placement bias increases.Experiments have been carried out to study the relationship between the volume of the droplet and the success rate of self-alignment.The results show that the success rate can reach 100%when the volume of the droplet is larger than 30 nL and less than 110 nL and the placement biases are in the range of 50μm to 500μm.This proposed method takes the advantages of fast robotic micro-assembly technique and high precision surface tension driven self-alignment technique and provides a new method for integration of the MEMS and stretchable electronics.
作者
常博
徐彬
王彬开
李席
王敏
CHANG Bo;XU Bin;WANG Bin-kai;LI Xi;WANG Min(College of Mechanical and Electrical Engineering,Shaanxi University of Science&Technology,Xi′an 710021,China)
出处
《陕西科技大学学报》
CAS
北大核心
2021年第1期153-158,共6页
Journal of Shaanxi University of Science & Technology
基金
国家自然科学基金项目(61703255)
陕西省科技厅科技计划项目(2019KW-006)
陕西省教育厅科研计划项目(20JC009)
中兴通讯股份有限公司产学研协同创新工程项目(2017223CG/CXY031)。
关键词
微组装
自对齐
自组装
表面张力
液桥
micro-assembly
self-alignment
self-assembly
surface tension
liquid bridge
