摘要
We design and fabricateλ/2 coplanar waveguide NbN resonators,the thickness and length of which are only several nanometers and hundred microns,respectively.The quality factor of such compact resonators can reach up to 7.5×10~4 at single photon power level at 30 m K with the resonance frequency around 6.835 GHz.In order to tune the resonant frequency,the resonator is terminated to the ground with a dc-SQUID.By tuning the magnetic flux in the dc-SQUID,the effective inductance of the dc-SQUID is varied,which leads to the change in the resonant frequency of the resonator.The tunability range is more than 30 MHz and the quality factor is about 3×10~3.These compact and tunable NbN resonators have potential applications in the quantum information processing,such as in the precision measurement,coupling and/or reading out the quantum states of qubits.
基金
Project partially supported by the National Key R&D Program of China(Grant No.2016YFA0301801)
the National Natural Science Foundation of China(Grant Nos.11474154 and 61521001)
PAPD,Dengfeng Project B of Nanjing University
the Fundamental Research Funds for the Central Universities,China(Grant No.14380134)。
