摘要
Single crystal 6H-SiC was irradiated by inert gas ions(He,Ne,Kr and Xe ions)to various damage levels at room temperature.Nano-indentation test was performed to investigate the hardness change behavior with damage levels.The depth profile of nano-hardness for 6H-SiC decreased with increasing depth for both the pristine and irradiated samples,which was known as indentation size effect(ISE)[1].Nix-Gao model was proposed to determine an asymptotic value of nanohardness by taking account of ISE for both the pristine and irradiated samples[2].In this study,nano-hardness of the irradiated samples showed a strong dependence on damage level and showed a weak dependence on ions species,as shown in Fig.1.From the dependence of hardness on damage,it was found that the change of hardness demonstrated three distinguishable stages with damage。
