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高Mo含量的CrMoCN涂层的摩擦学与腐蚀特性研究 被引量:3

Tribological and Corrosive Properties of CrMoCN Coatings with High Mo Contents
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摘要 长期处于高温、高湿、高盐度环境下的机械设备零部件会出现严重的摩擦、磨损和腐蚀问题,采用高Mo含量多元薄膜对零部件进行表面防护可以有效提高其耐磨性和耐腐蚀性。采用非平衡闭合场磁控溅射技术在Si片和钛合金上制备CrMoCN涂层。在Ar/N2混合气体中,通过改变Mo靶电流获得具有不同Mo含量的CrMoCN涂层。利用扫描电镜(SEM)、X射线衍射(XRD)和X射线光电子能谱(XPS)对涂层的微观结构及形貌、晶相结构和化学键组成进行表征,用纳米压痕仪测量涂层硬度,采用球盘式摩擦磨损试验机研究CrMoCN涂层与SiC小球在不同环境下对磨时的摩擦学特性,利用电化学工作站测量涂层的耐腐蚀特性。结果表明:随着Mo含量的增加,CrMoCN涂层结构变得致密,且形成了(Cr,Mo) N置换固溶体和γ-Mo2N相。由于Cr、Mo元素与水反应形成氧化物润滑相,使CrMoCN涂层和Si C小球在人工海水中对磨时的摩擦系数低于空气中的摩擦系数,CrMoCN涂层在人工海水中的磨损率低于在空气中的磨损率,说明CrMoCN涂层在人工海水中具有更好的摩擦学特性。同时,高Mo含量涂层在人工海水中具有更好的耐腐蚀性。 The serious friction,wear and corrosion problems always occurred on the parts of mechanical equipment,which worked in the high temperature,humidity and salinity environment for a long time. The surface of parts protected by multi-component coatings with high Mo content could effectively improve their wear and corrosion resistance. In this work,Cr MoCN coatings were prepared on Si wafers and titanium alloys by unbalance magnetron sputtering system. The content of Mo in the coatings was controlled by changing the Mo target current in Ar/N2 mixed atmosphere. In addition,the microstructure,morphology,crystal structure and chemical bond composition of the coatings were observed and analyzed using scanning electron microscope( SEM),X-ray diffraction( XRD) and X-ray photoelectron spectroscopy( XPS). The hardness of Cr MoCN coatings was measured using a nanoindenter,and the tribological properties of Cr MoCN sliding against Si C balls under different environments were investigated using a ball-on-disk tester. Moreover,the corrosion resistance of coatings was determined using an electrochemical workstation. Results indicated that the microstructure of Cr MoCN coatings became dense with increasing Mo content,and the( Cr,Mo) N substitutional solid solution and γ-Mo2 N phase formed in the coatings. Because Cr element and Mo element reacted with water during friction to form lubricative oxide phase,the friction coefficient of Cr MoCN/Si C tribopairs in artificial seawater was lower than that in air,and the wear rate of coatings in artificial seawater was less than that in air,which indicated that Cr MoCN coatings had better tribological properties in artificial seawater. In artificial seawater,Cr MoCN coatings with high Mo contents possessed more excellent corrosion resistance.
作者 齐元青 付永强 张懋达 周飞 QI Yuan-qing;FU Yong-qiang;ZHANG Mao-da;ZHOU Fei(National Key Laboratory of Helicopter Transmission Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
出处 《材料保护》 CAS CSCD 北大核心 2020年第7期6-15,共10页 Materials Protection
基金 国家自然科学基金项目(51775271) 南京航空航天大学研究生创新基地(实验室)开放基金(kfjj20180509) 直升机传动技术重点实验室自主课题资助项目(HTL-A-19G04)。
关键词 磁控溅射 CrMoCN涂层 微观结构 硬度 摩擦特性 腐蚀特性 magnetron sputtering CrMoCN coatings microstructure hardness tribological properties corrosion resistance
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