摘要
超声换能器是微电子封装技术的核心执行元件,为解决传统一维纵振超声换能器键合效率低、键合面不均匀及键合点不牢靠等问题,采用ANSYS仿真软件建立换能器有限元模型进行模态分析及谐响应分析,设计了一种可同时实现轴向纵振、水平弯振及竖直俯仰振动的40 kHz多向复合夹心压电式超声换能器。其中,压电部分由整圆环和可单独激励的1/4圆环陶瓷片组成。利用阻抗分析仪实物测试,得到换能器纵振、弯振及俯仰振动的阻抗-频率特性曲线。结果表明,测试值与仿真值基本一致,且结构性能参数均符合键合要求,验证了该结构的合理性。
The ultrasonic transducer is the core actuator of microelectronic packaging technology.In order to solve the problems of low bonding efficiency,uneven bonding surface and insecure bonding point of traditional one-dimensional longitudinal vibration ultrasonic transducer,the finite element model of transducer is established by ANSYS simulation software for modal analysis and harmonic response analysis.A kind of 40 kHz multi-directional composite sandwich piezoelectric ultrasonic transducer that can realize axial longitudinal vibration,horizontal bending vibration and vertical pitching vibration at the same time is designed.Among them,the piezoelectric part consists of a whole ring and a 1/4 ring ceramic sheet which can be excited separately.The impedance frequency characteristic curves of longitudinal vibration,bending vibration and pitching vibration of the transducer are obtained by the physical test of the impedance analyzer.The results show that the test values are basically consistent with that of the simulation analysis,and the structural performance parameters meet the bonding requirements,which verify the rationality of the structure.
作者
高昌彬
薛进学
马文举
隆志力
赵恒
GAO Changbin;XUE Jinxue;MA Wenju;LONG Zhili;ZHAO Heng(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China;School of Mechanical Engineering and Automation,Harbin Institute of Technology(Shenzhen),Shenzhen 518055,China)
出处
《压电与声光》
CAS
北大核心
2020年第5期640-643,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(U1713206)
深圳市学科布局基础研究基金资助项目(JCYJ20170413112645981,JCYJ20150928162432701)。
关键词
超声换能器
多向复合
模态分析
谐响应分析
同频共振
ultrasonic transducer
multidirectional composite
modal analysis
harmonic response analysis
same frequency resonance
