摘要
金属材料的一维、二维以及三维制造一直是材料加工领域的热点内容,双极电化学加工方法由于其无导线直连、非均匀加工等特点,近年来得到了广泛应用。提出基于双极电化学原理的金属定位沉积方案,用以实现金属图形直接制备。通过制备具有不同形状腔体的双极驱动电极,在基板上沉积出与电极腔体类似的金属图形。本实验主要沉积Cu、CuNi合金,通过场发射扫描电子显微镜(FESEM)表征材料的结构。在具体实施过程中,考查了电压、沉积时间、电极底部与基板的距离、电解质的流量等因素对沉积过程和所得金属图形的影响。用Supereyes B011光学显微镜拍摄记录沉积的金属图形,根据沉积图形的变化,来分析各种因素的影响规律。经过工艺优化,获得了清晰的金属图形,验证了利用双极驱动电极进行无线定位沉积金属图形的可操作性。
One-dimensional,two-dimensional and three-dimensional manufacturing of metal materials have always been a hot topic in the field of material processing.Bipolar electrochemical machining methods have been widely used in recent years due to their characteristics such as no wire direct connection and non-uniform processing.In this paper,a metal positioning deposition scheme based on the principle of bipolar electrochemistry is proposed to realize the direct preparation of metal patterns.By preparing bipolar driving electrodes with cavities of different shapes,a metal pattern similar to the electrode cavity is deposited on the substrate.In this experiment,Cu and Cu,Ni alloys were mainly deposited,and the structure of the material was characterized by field emission scanning electron microscope(FESEM).In the specific implementation process,the influence of factors such as voltage,deposition time,distance between the bottom of the electrode and the substrate,the flow rate of the electrolyte,etc.on the deposition process and the resulting metal pattern were investigated.SupereyesB011 optical microscope was used to record the deposited metal pattern.Change to analyze the influence of various factors.After process optimization,a clear metal pattern was obtained in this experiment,which verified the operability of wireless positioning and deposition of metal patterns using bipolar drive electrodes.
作者
丘德立
李冰
韩尚辰
QIU De-li;Li Bing;HAN Shang-chen(School of Chemistry and Chemical Engineering,Hefei University of Technology,Hefei 230009,China)
出处
《安徽化工》
CAS
2020年第5期41-45,共5页
Anhui Chemical Industry
基金
安徽省自然科学基金青年项目“基于双极性电极的无线沉积技术开发及其应用研究”(项目编号:JZ2018AKZR0044)。
关键词
双极电化学
定位沉积
双极驱动电极
金属图形
bipolar electrochemistry
positioning deposition
bipolar driving electrode
metal pattern
