摘要
为研究边缘效应对微力测量装置中柱状电容结构设计的影响,利用理论计算结合有限元模拟方法,分析了目前常用柱状电容装置在不同电极重叠长度、间距、加载电压等参数条件下,电容边缘效应与微力输出值之间的联系,并在此基础上提出了适用于微力测量装置中柱状电容的结构设计与工作参数。结果表明:微力测量装置中的柱状电容装置在电极重叠长度且电极间距均较小时,存在可忽略边缘效应影响的区域,此区域内微力输出具有较好稳定性,重叠长度变化时微力输出改变极小;电极间距较大时,随着加载电压升高,边缘效应的影响增强;且随着内外电极重叠长度增大,边缘效应影响程度受加载电压影响更明显。
The influence of fringe effect on the structure design of micro force measurement device was studied by finite element method and theoretical analysis.Relationship between the capacitor fringe effect and the output micro force value was analyzed under the conditions of different electrode overlap length,spacing and loading voltage.The structural design and application parameters of cylindrical capacitors in micro force measurement device were proposed.The results show that the cylindrical capacitance in the micro force measurement device had an area where the edge effect could be ignored when the electrode overlap length and the distance were small.The output micro force value in this area was excellent stability and did not follow the change in overlap length.When the electrode distance was large,the fringe effect increased with the increase of the loading voltage.And as the overlap length of the internal and external electrodes increased,the fringe effect was more significantly affected by the loading voltage.
作者
徐立
王淑香
张卫卫
郑培亮
黄振宇
XU Li;WANG Shu-xiang;ZHANG Wei-wei;ZHENG Pei-liang;HUANG Zhen-yu(Guangdong Provincial Key Laboratory of Modern Geometric and Mechanical Metrology Technology,Guangdong Provincial Institute of Metrology,Guangzhou 510405,China;Guangzhou Maritime University,Guangzhou 510725,China;Technology and Engineering Center for Space Utilization,Chinese Academy of Sciences,Beijing 100094,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2020年第8期96-99,126,共5页
Instrument Technique and Sensor
基金
国家自然科学基金(51806041)
国家市场监管总局科技计划项目(2016QK028)
广东省科技计划项目(2014A040401044)。
关键词
边缘效应
微力
测量装置
柱状电容
结构设计
fringe effect
micro force
measurement device
cylindrical capacitance
structure design
