摘要
光反射测温过程主要包括CTR校准和温度测量两大步骤,涉及诸多测量量和影响因素。针对基于相机的光反射显微热成像系统,对CTR校准过程和温度测量过程中的各测量量对测温结果的误差贡献进行分析,同时还分析了相机读数的固定偏置项以及光源和相机响应度漂移对测温结果的误差贡献。基于分析结果,结合典型参数开展了估算和讨论,可为基于相机光反射测温系统的设计、组建和应用提供有益参考。
Thermoreflectance includes two major procedures,namingly CTRcalibration and temperature measurement.Several measured quantities and influencing factors are involved in each procedure. Error analysis on measured quantities involved with CTRcalibration and temperature measurement procedure were present. Moreover,fixed bias on CCD count and drift of light source and camera responsiveness were included in the analysis as well. Approximate calculation with typical parameters were carried on according to the result of the analysis,and the discussion were made can provide some reference for the design,construction and application of the CCD-based thermoreflectance systems.
作者
刘岩
翟玉卫
李灏
韩伟
荆晓冬
梁法国
LIU Yan;ZHAI Yu-wei;LI Hao;HAN Wei;JING Xiao-dong;LIANG Fa-guo(The 13th Research Institute,CETC,Shijiazhuang,Hebei 050051,China)
出处
《计量学报》
CSCD
北大核心
2020年第5期558-562,共5页
Acta Metrologica Sinica
关键词
计量学
光反射测温
误差分析
显微
热成像
metrology
thermoreflectance
error analysis
microscopy
thermal imaging
