摘要
When a fast-steering mirror(FSM)system is designed,satisfying the performance requirements before fabrication and assembly is vital.This study proposes a structural parameter design approach for an FSM system based on the quantitative analysis of the required closed-loop bandwidth.First,the open-loop transfer function of the FSM system is derived.In accordance with the transfer function,the notch filter and proportional-integral(PI)feedback controller are designed as a closed-loop controller.The gains of the PI controller are determined by maximizing the closed-loop bandwidth while ensuring the robustness of the system.Then,the two unknown variables of rotational radius and stiffness in the open-loop transfer function are optimized,considering the bandwidth as a constraint condition.Finally,the structural parameters of the stage are determined on the basis of the optimized results of rotational radius and stiffness.Simulations are conducted to verify the theoretical analysis.A prototype of the FSM system is fabricated,and corresponding experimental tests are conducted.Experimental results indicate that the bandwidth of the proposed FSM system is 117.6 Hz,which satisfies the minimum bandwidth requirement of 100 Hz.
基金
This work was supported by the Science Challenge Project(Grant No.JCKY2016212A5060105).
