摘要
本文突破传统阻容分压、电阻分压电压传感器的设计思路,基于MEMS加工技术,设计了一种十字梁结构膜片,建立了数学模型,利用有限元分析法对其结构进行仿真研究,得到十字梁硅微结构的电压传感膜片理想参数,通过对十字梁膜片进行固有频率分析,计算出远大于工频,表明设计的十字梁膜片能对交、直流电压进行测量。
This paper breaks through the design idea of the traditional resistance capacitance voltage sensor and resistance voltage sensor.Based on the MEMS processing technology,a cross beam structure diaphragm is designed,a mathematical model is established,and its structure is simulated by the finite element analysis method,and the ideal parameters of the voltage sensing diaphragm of the cross beam silicon microstructure are obtained.The natural frequency of the cross beam diaphragm is analyzed.The results show that the designed cross beam diaphragm can measure the AC and DC voltage.
出处
《科技视界》
2020年第5期120-122,共3页
Science & Technology Vision
基金
衢州职业技术学院2017年度校科研重点项目(QZYZ1707)。
关键词
电压测量
硅微结构
有限元仿真
Voltage measurement
Silicon microstructure
Finite element simulation
