摘要
为了优化热电堆式气体流量传感器的结构参数使其灵敏度达到最佳,建立了一个一维数学模型,此模型能够快速反映当器件关键尺寸变化时传感器输出电压的变化,有限元仿真软件结果证实了此一维模型的有效性。并利用此模型对一系列器件关键参数进行仿真分析,结合工艺参数得到了一个最优化的器件尺寸。根据这一尺寸制造了一个p+Si/Au热电堆式气体流量传感器以进一步验证一维模型。测试得到的传感器归一化灵敏度为481 [mV/(m/s)]/W。此参数比之前的工作高出数倍。此外,测试所得的输出电压曲线与一维模型仿真的曲线一致性也较好,进一步证明了这一一维模型的正确性。
In order to analyze the response of the thermopile-based gas flow sensor when key design parameters change,a 1-D model of thermopile-based sensor is employed and validated by the FEA(finite-element-analysis)model. With this 1-D model,the key parameters of the sensor can be simulated to optimized the sensitivity. Based on these analyses,a new p+Si/Au thermopile-based flow sensor is designed and fabricated to verify the 1-D model. The sensor shows a normalized sensitivity of 481 [mV/(m/s)]/W which is much bigger than that of previously reported works. Tested results of the sensor have a good agreement with that of the 1-D model,which prove the credibility of the 1-D model.
作者
王珊珊
王家畴
李昕欣
WANG Shanshan;WANG Jiachou;LI Xinxin(Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2020年第2期161-166,共6页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(61674160,61834007)。
