摘要
In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition(CVD)using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were characterized by scanning electron microscopy(SEM), energy dispersive X-ray spectroscopy(EDS) and X-ray diffraction(XRD). The results indicated that the morphologies, compositions and phases of the composite coatings were related to the deposition temperature, the flow rate of the carrier H2 gas, and the ratio of C/Zr. Moreover, the co-deposition mechanism of the composite coatings was also studied. It was found that different deposition temperatures resulted in different deposition mechanisms. At temperatures in the range of 1150–1250℃, the Zr C-SiC co-deposition was controlled by the surface kinetic process. At temperatures in the range of 1250–1400℃, the Zr C-SiC co-deposition was controlled by the mass transport process.
In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition（CVD）using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were characterized by scanning electron microscopy（SEM）, energy dispersive X-ray spectroscopy（EDS） and X-ray diffraction（XRD）. The results indicated that the morphologies, compositions and phases of the composite coatings were related to the deposition temperature, the flow rate of the carrier H2 gas, and the ratio of C/Zr. Moreover, the co-deposition mechanism of the composite coatings was also studied. It was found that different deposition temperatures resulted in different deposition mechanisms. At temperatures in the range of 1150–1250?C, the Zr C-SiC co-deposition was controlled by the surface kinetic process. At temperatures in the range of 1250–1400?C, the Zr C-SiC co-deposition was controlled by the mass transport process.
