摘要
Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.
作者
Jiping YIN
Qing WANG
Xinlong WU
Chunyu CHENG
Dechun BA
Zeng LIN
殷冀平;王庆;吴鑫龙;程春玉;巴德纯;蔺增(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,People's Republic of China;Key Laboratory of Implant Device and Interface Science of Liaoning Province,Northeastern University,Shenyang 110819,People’s Republic of China)
