摘要
为满足中科院高能物理研究所环型正负电子对撞机项目650 MHz/800 kW连续波速调管的超高真空排气需要,北方华创真空研制了由无油干泵和磁悬浮分子泵作为预抽系统,溅射离子泵作为主抽系统的特大型超高真空排气台。设备以温度和真空度作为主要工艺参数,对尺寸达到Φ1600 mm×5000 mm的连续波速调管进行高温真空烘烤排气,极限真空度优于8.0×10^-8 Pa;烘烤温度25~600℃连续可调,温区均匀性±5℃,具备充氮快速降温功能,整个工艺过程实现自动化控制。
We reported the development of the extra-large ultra-high vacuum(UHV) degassing station,dedicated to high temperature baking/degassing of the 650 MHz/800 kW continuous-wave speed regulating tube of Circular Electron Positron Collider(CEPC).The vertical baking/degassing station mainly consisted of a UHV chamber(Φ1600 mm×5000 mm),internal/external pumping units including oil-free dry vacuum pumps,magnetic suspension turbo-molecular pumps and sputter-ion pumps;high-temperature baking hood with six cylindrical sections and independent heating-units,elevator,automatic control units and operation/supporting platform.The UHV degassing station was tested.The results show that the automatic controlled degassing station meets all the stringent design requirements.To be specific,the base pressure was better than 8.0×10^-8 Pa,the continuously adjustable baking temperature covers 25~600℃ range with a uniformity of ±5℃.In addition,the UHV-vacuum system can be rapidly cooled with 80 K nitrogen pumped from liquid nitrogen tank.
作者
边悦
刘春艳
Bian Yue;Liu Chunyan(Beijing NAURA Vacuum Technology Co.Lid,Beijing 100015,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2019年第12期1079-1082,共4页
Chinese Journal of Vacuum Science and Technology
