摘要
在应用传统提拉法生长晶体的过程中,经常需要人为实时观察晶体直径的生长变化,从而控制生长温度达到晶体等径生长的目的。根据企业提出的晶体生长监测需求,设计了一款超长工作距变焦显微物镜,实现晶体生长的自动监控。晶体直径的监测范围为0~100 mm,系统采用机械变焦方式,工作波段为3~5μm,变焦范围为19~90 mm,放大倍率为3~12,变倍比为4倍。系统采用的红外探测器型号为Onca-MWIR-InSb-640,其像元大小为15μm×15μm。利用Zemax进行光学系统设计优化,在截止频率34 lp/mm处,各组态像质优良,中心视场和0.707视场处MTF曲线均接近衍射极限,点列图的RMS半径也均小于艾里斑半径,系统各项指标均满足设计指标要求,可以实现对晶体生长过程的高精度监控。
In the process of growing crystals by the conventional pulling method,in order to control the growth temperature to achieve the equal diameter growth of the crystal,it is necessary to observe the growth change of the crystal diameter in real time.According to the crystal growth monitoring requirements proposed by the company,an ultra-long working distance zoom microscope objective lens for automatic monitoring of crystal growth is designed.The crystal diameter can be monitored from 0~100 mm.The system adopts mechanical zoom mode;the working band is 3~5μm;the zoom range is 19~90 mm;the magnification is 3~12;and the zoom ratio is 4 times.The infrared detector model used in the system is Onca-MWIR-InSb-640 used with pixel size 15μm×15μm.The optical system optimization is carried out by using Zemax.There are excellent quality of each configuration at cut-off frequency 34 lp/mm for each configuration.The MTF values for central field and 0.707 field approach to the diffraction limit.The RMS radius of the spot diagram is smaller than the radius of Airy disk.All the indicators of the system meet the requirements of the design indicators,which can achieve high-precision monitoring of the crystal growth process.
作者
李晨晓
陈宇
张润泽
李阳
张家铭
LI Chen-xiao;CHEN Yu;ZHANG Run-ze;LI Yang;ZHANG Jia-ming(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022)
出处
《长春理工大学学报（自然科学版）》
2019年第5期13-16,22,共5页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
吉林省发改委产业创新专项资金项目（2017C037-1)
关键词
晶体生长
超长工作距离
变焦显微镜
ZEMAX
crystal growth
extra long working distance
zoom microscope objective
Zemax
