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Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications 被引量:2

Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications
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摘要 The intensive development of micro-/nanotechnologies offers a new route to construct sophisticated architectures of emerging soft electronics.Among the many classes of stretchable materials,micro-/nanostructured poly(dimethylsiloxane)(PDMS)has emerged as a vital building block based on its merits of flexibility,stretchability,simple processing,and,more importantly,high degrees of freedom of incorporation with other functional materials,including metals and semiconductors.The artificially designed geometries play important roles in achieving the desired mechanical and electrical performances of devices and thus show great potential for applications in the fields of stretchable displays,sensors and actuators as well as in health-monitoring device platforms.Meanwhile,novel lithographic methods to produce stretchable platforms with superb reliability have recently attracted research interest.The aim of this review is to comprehensively summarize the progress regarding micro-/nanostructured PDMS and their promising soft electronic applications.This review is concluded with a brief outlook and further research directions. The intensive development of micro-/nanotechnologies offers a new route to construct sophisticated architectures of emerging soft electronics.Among the many classes of stretchable materials,micro-/nanostructured poly(dimethylsiloxane)(PDMS)has emerged as a vital building block based on its merits of flexibility,stretchability,simple processing,and,more importantly,high degrees of freedom of incorporation with other functional materials,including metals and semiconductors.The artificially designed geometries play important roles in achieving the desired mechanical and electrical performances of devices and thus show great potential for applications in the fields of stretchable displays,sensors and actuators as well as in health-monitoring device platforms.Meanwhile,novel lithographic methods to produce stretchable platforms with superb reliability have recently attracted research interest.The aim of this review is to comprehensively summarize the progress regarding micro-/nanostructured PDMS and their promising soft electronic applications.This review is concluded with a brief outlook and further research directions.
出处 《Journal of Semiconductors》 EI CAS CSCD 2019年第11期48-65,共18页 半导体学报(英文版)
基金 supported by the National Research Foundation (NRF) of Korea funded by the Ministry of Science and ICT and Future Planning (MSIP) (2016R1E1A1A01943131)
关键词 lithographic technique microstructure NANOSTRUCTURE POLYDIMETHYLSILOXANE SOFT electronics lithographic technique microstructure nanostructure polydimethylsiloxane soft electronics
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