摘要
硅基滤波器在毫米波频段具有高Q值、低损耗、小体积、低成本的明显优势,并且易于与集成电路集成,是解决毫米波滤波器芯片化的绝佳手段。文章首先给出了硅基微加工工艺滤波器的设计方法分类,然后着重介绍近年来国内外硅基微加工工艺滤波器的五种不同设计方法:集总式、薄膜腔体型、带线型、自屏蔽型以及基片集成波导型。通过介绍各方法的工作原理,重点分析了各方法的研究现状及优缺点,并进行了综合对比分析,从加工工艺难度和性能上来看,自屏蔽型以及基片集成波导型硅基微加工工艺滤波器具有更大的发展空间和应用前景。
Silicon-based filters have the obvious advantages of high Q value,low loss,small size,low cost and they are easy to integrate with MMIC circuits.In this paper,five different design methods of silicon-based microfabrication technology filters are introduced:lumped type,thin film cavity type,stripline type,self-shielding type and substrate integrated waveguide type.By introducing the working principle of each method,the research status,advantages and disadvantages of each method are analyzed,and a comparison is made.From the processing difficulty and performance,self-shielding and substrate integrated waveguide type silicon-based microfabrication technology filters have greater development space and application prospects.
作者
万晶
汪峰
李琛
王霄
王嘉毅
阎跃鹏
梁晓新
WAN Jing;WANG Feng;LI Chen;WANG Xiao;WANG Jiayi;YAN Yuepeng;LIANG Xiaoxin(Institute of Microelectronic of Chinese Academy of Sciences,Beijing,100029,China;Bureau of Major R&D Programs Chinese Academy of Sciences,Beijing 100864,China)
出处
《空间电子技术》
2019年第5期7-14,共8页
Space Electronic Technology
关键词
硅基片
微加工工艺
滤波器
毫米波
Silicon-based
Microfabrication technology
Filters
Millimeter wave