摘要
采用光谱共焦传感器以及激光位移传感器相互配合的设计方式,研制一套新型刮板细度计示值误差非接触自动校准装置。利用光谱共焦传感器测量光点可小至5μm的优点,实现对刮板细度计测量点的精准定位,同时避免了接触测量造成测头及测量面磨损的问题。经实验证明,该装置测量重复性好、效率高,测量结果准确可靠,具有重要技术推广价值。
A new non-contact automatic calibration device for fineness of grind gage meter is developed by using the design method of com-bining spectral confocal sensor and laser displacement sensor.By using the advantages of spectral confocal sensor that the measurement spot size can be as small as 5μm,the measuring points of the fineness of grind gage can be precisely located,and the wear of probe and measuring sur-face caused by contact measurement can be avoided.The experiment proves that the device has good repeatability,high efficiency,accurate and reliable measurement results,and has important technical popularization value.
作者
陈挺
卢歆
吴春晖
张晓
叶欣
陈宁
金挺
CHEN Ting;LU Xin;WU Chunhui;ZHANG Xiao;YE Xin;CHEN Ning;JIN Ting(Zhejiang Institute of Metrology,Hangzhou 310018,China)
出处
《计测技术》
2019年第5期40-43,共4页
Metrology & Measurement Technology
基金
浙江省质量技术监督局科研项目(20150216,20180104)
关键词
刮板细度计
光谱共焦
激光位移传感器
非接触计量测试
fineness of grind gage
spectral confocal
laser displacement sensor
non-contact metrology and measurement
