摘要
设计了一种基于狭缝波导的级联微环耦合谐振腔的声学传感器。分析狭缝波导结构特性并应用于级联微环谐振腔,基于光波导耦合模式方程得到系统的透射谱公式,构建出基于狭缝级联微环耦合谐振腔理论模型,利用时域有限差分法模拟计算系统的光学特性,再根据材料的声学特性和弹光效应,利用有限元法模拟计算系统的声学特性,得到系统的声学传感特性。研究表明:微环半径为5μm时,Q值达到1.24×10^4,系统灵敏度达到2 453.7 mV/kPa,声波检测范围为150 MHz。
This article proposes an ultrasound sensor based on a slot-based cascade micro-ring resonator.The structure of slot waveguide is analyzed and applied to micro-ring resonator.The transmission spectrum of the system is obtained which is based on the coupled mode equation of optical waveguide,and a theoretical model of optical micro-ring resonator based on slot waveguide is constructed.The optical field and acoustic field performance are simulated by finite difference time domain method and finite element method,respectively.The results show that the device achieves a much better sensing performance with the radius of micro-ring only 5μm:Q factor、sensitivity and detection range of acoustic wave is up to 1.24×10^4,2 453.7 mV/kPa and 150 MHz.
作者
陈芃宇
张雷
李鹏宇
赵超樱
CHEN Pengyu;ZHANG Lei;LI Pengyu;ZHAO Chaoying(School of Science,Hangzhou Dianzi University,Hangzhou Zhejiang 310018,China)
出处
《杭州电子科技大学学报（自然科学版）》
2019年第5期25-29,共5页
Journal of Hangzhou Dianzi University：Natural Sciences
基金
国家自然科学基金资助项目(11504074)
国家重点实验室开放基金资助项目(KF201801)
关键词
微环谐振器
狭缝波导
声场
micro-ring resonator
slot waveguide
acoustics
