摘要
大气压等离子体炬在生物医学等领域具有广泛的应用前景,其装置的研究受到各界的广泛关注。研究了一种采用微波固态源激发的大气等离子体炬,其激发微波频率为2.45 GHz,工作气体为氩气,通过调节微波功率和气体流量,在大气环境下形成了稳定的等离子体射流。通过实验研究了微波功率、气体流量与等离子体炬形状和稳定性之间的关系。实验结果表明,气体流量与功率大小对等离子体射流的稳定性与体积的大小有很大的影响。
Atmospheric pressure plasma torch has broad application prospects in biomedicine and other fields,and the research on its device has attracted wide attention from all walks of life.An atmospheric plasma torch excited by microwave solid-state source was studied.The microwave frequency is 2.45 GHz and the working gas is argon.By adjusting the microwave power and gas flow rate,a stable plasma jet was formed in the atmosphere.The relationship between microwave power,gas flow rate and the shape and stability of plasma torch was studied experimentally,and the experimental results showed that the gas flow rate and microwave power had great influence on the stability and volume of plasma jet.
作者
聂聪
傅文杰
鄢扬
NIE Cong;FU Wen-jie;YAN Yang(School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610051,China)
出处
《真空电子技术》
2019年第4期61-64,75,共5页
Vacuum Electronics
关键词
微波
等离子体炬
大气压
Microwave
Plasma torch
Atmospheric pressure
