摘要
多晶硅在诸多领域被广泛的应用。目前改良西门子法以其节能、节省物耗、减少污染等优点被广泛应用于多晶硅生产中。多晶硅生产厂家现在大多只能生产出太阳能级多晶硅,而对电子级多晶硅的生产一直存在着技术瓶颈。文章从生产原料中的硅粉、生产工艺中的精馏工艺、尾气回收工艺、还原工艺分别对生产电子级多晶硅产品质量的影响作了详细地阐述。从工艺参数控制、原料及中间产物质量管控等方面着重加以论述。
Polysilicon is widely used in many fields. At present the modified Siemens method is widely used in polysilicon production for its advantages of energy saving, material consumption saving and pollution reduction. Most polysilicon manufacturers can only produce solar level polysilicon, but the production of electronic polysilicon has always been a technical bottleneck. The influences of silicon powder, rectification process, tail gas recovery process and reduction process on the quality of polysilicon products were discussed in detail. From the process parameter control, the raw material and the inctermediate product quality control and so on aspect emphatically elaborated. It has certain guiding effect on polysilicon production of electronic grade products.
作者
张娜
ZHANG Na(Guodian Inner Mongolia Jingyang Energy Co.,Ltd.,Ordos 010321,China)
出处
《化工管理》
2019年第28期88-89,共2页
Chemical Engineering Management
关键词
多晶硅
电子级
原料
精馏
尾气回收
还原
polysilicon
electronic level
therawmaterial
distillation
exhaust gas recycling
reduction
