摘要
基于铌酸锂基底的声表面波传感器电极材料设计,采用COMSOLMultiphysics仿真分析软件对声表面波传感器单对叉指进行三维建模,并进行固体力学和静电学物理场的有限元仿真分析。结果表明,不同电极材料和厚度对其反对称模态频率、对称模态频率、导纳特性曲线及阻抗特性曲线的影响较大,且通过改变电极材料的厚度有效抑制寄生谐振为进一步的研究提供了理论依据。
Based on the design of the surface acoustic wave sensor electrode material on lithium niobate substrate, the three-dimensional modeling of single-pair interdigital finger of surface acoustic wave sensor was carried out by COMSOL Multiphysics simulation analysis software, and the finite element simulation analysis of solid mechanics and electrostatic physics field was carried out. The results show that different electrode materials and thickness have great influence on anti-symmetric mode frequency, symmetric mode frequency, admittance characteristic curve and impedance characteristic curve, and the effective suppression of parasitic resonance can be realized by changing the thickness of electrode material. The results provide a theoretical basis for further research.
作者
张永威
郭涛
谭秋林
张利威
ZHANG Yongwei;GUO Tao;TAN Qiulin;ZHANG Liwei(Key Laboratory for Electronic Measurement Technology, North University of China,Taiyuan 030051,China;Key Laboratoryof Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China,Taiyuan 030051,China)
出处
《压电与声光》
CAS
北大核心
2019年第4期497-500,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(U1837209)
关键词
声表面波传感器
有限元分析
对称模态频率
电极厚度
surface acoustic wave sensor
finite element analysis
symmetric mode frequency
electrode thickness
