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容性耦合射频放电等离子体的仿真模拟与实验诊断研究 被引量:18

Simulations and Experimental Diagnostic of Capacitively Coupled RF Discharge Plasma
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摘要 针对工业生产与军事应用上低气压、低温非热平衡等离子体的制备和实验诊断问题,采用COMSOL软件等离子体模块进行仿真模拟,建立容性耦合射频等离子体放电的一维流体模型,设定He气为工作气体,数值研究不同电压、不同气压条件下等离子体电子数密度和电子温度的轴向分布。搭建等离子体产生及诊断实验平台,根据均匀射频放电的等效回路计算得到电子密度ne与电子温度Te,将所得数据与流体模型仿真模拟相比较,得到了一致的结果。研究表明:当气体压强为100~250Pa时,极板间电子密度沿轴向先增大后减小,平均电子密度随驱动电压与输入功率的增加而增加;电子温度在极板中心处取得最小值,极板边缘存在两个峰值,平均电子温度仅是气压与腔体尺寸的函数,随驱动电压和功率的变化不明显,仅随气压的增大而减小。随着输入功率的增加,电子密度由逐渐上升转变为迅速上升,且在不同气压下这种电子密度的跃变出现在不同的电压幅值处,这标志着容性耦合放电中的α-γ模式转变。所得结论扩大了模拟仿真与实验快速无干扰诊断的应用范围,为进一步研究低温等离子体放电性质提供了技术支持。 In this paper,the preparation and experimental diagnostic of low-pressure and low-temperature non-equilibrium plasma in industrial production and military applications are investigated.A one-dimensional fluid model of capacitive coupled RF plasma discharge is established by using the COMSOL software plasma module.The axial distribution of electron number density and electron temperature under different pressures and different voltages are calculated taking Helium as working gas.The electron density ne and electron temperature Te are also calculated according to the equivalent circuit of uniform RF discharge by building a plasma generation and diagnosis platform.The results show that when the gas pressure is 100~250Pa,the electron density increases first and then decreases along the axis,the electron temperature reaches the minimum at the center of the electrodes.There are two peaks in the edge of the electrodes,and the average electron temperature is only a function of the pressure and the size of the cavity.With the increase of input power,the electron density increases from gradually to rapidly,and this jump of electron density appears in different voltage amplitudes at different pressures,which indicates theα-γtransition in capacitively coupled discharge.The experimental diagnostic is consistent with the results of COMSOL simulation.The conclusions expand the application range of simulation and experiment for fast non-interference diagnosis,which is useful for further study on low-temperature plasma discharge.
作者 朱寒 何湘 陈秉岩 陈建平 Zhu Han;He Xiang;Chen Bingyan;Chen Jianping(College of Science Hohai University Nanjing 210098 China;Beijing Aeronautical Technology Research Center Beijing 100076 China)
出处 《电工技术学报》 EI CSCD 北大核心 2019年第16期3504-3511,共8页 Transactions of China Electrotechnical Society
基金 国家自然科学基金(61378037) 中央高校基本科研业务费项目(2018B19814)资助
关键词 容性耦合射频放电 等离子体 实验诊断 COMSOL仿真 Capacitive coupled radio frequency discharge plasma experimental diagnostic COMSOL simulation
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