摘要
对 157 nm 激光微加工技术制作的全光纤珐珀应变计进行了实验分析。介绍了光纤 FP 应变计的制作过程与工作原理,并开展了应变计的加载和温度测试试验。实验表明该光纤 FP 应变计粘贴于悬臂梁后,线性度和重复性较好,在温升过程中,由于悬臂梁的热膨胀造成了光纤应变计的热输出。通过采用对称贴片耦合求解方法进行热输出补偿,光纤应变计的热输出减小为补偿前的 2.1%,为变温环境下的高精度测量提供了解决方案。
This paper describes the research about all-fiber Fabry-Perot strain gage which is manufactured by 157 nm laser micromachining system.The fabrication process and working principle of the fiber FP strain gage were introduced,and the loading and temperature tests were carried out.The tests results show that the fiber optic gages installed on the cantilever beam have good linearity and repeatability.Due to the thermal expansion of the cantilever beam during the temperature rise test,there exists obvious thermal output of the fiber optic strain gages.The thermal output of the fiber optic strain gauge is reduced to 2.1% before compensation by means of symmetrical patch coupling solution,which provides a solution for high-precision measurement under variable temperature environment.
作者
闵夫
杨彦广
戴金雯
冉曾令
MIN Fu;YANG Yan-guang;DAI Jin-wen;RAN Zeng-ling(Hypervelocity Aerodynamics Research Institute,China Aerodynamics Research and Development Center,Mianyang 621000,China;School of Communication and Information Engineering,University of Electronic Science and Technology,Chengdu 610000,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2019年第7期26-28,33,共4页
Instrument Technique and Sensor
基金
科技部重大科学仪器设备开发专项项目(2012YQ250002)
关键词
光纤应变计
珐珀
应变测量
温度补偿
fiber optic strain gage
Fabry Perot
strain measurement
temperature compensation
