2Uwe Brand, Thomas Kleine-Besten, Heinrich Schwenke. Development of a special CM M for dimensional metrology on microsystem components [R]. ASPE 15th Annual Meeting in Scottsdale (Arizona), 22th-27th, October, 2000. 被引量：1
3E. B. Hughes, Wilson A, G. N. Peggs. Design of high accuracy CMM based on multilateration techniques [J]. Annals of the CIRP 49 (2000), pp.391-394. 被引量：1
4Leach R Murphy J. The design of co-ordinate measuring probe for characterising truly three-dimensional micro- structures [R]. 4th euspen International Conference, Glasgow, UK, 31 May 2004-2 June 2004, 230-231. 被引量：1
5G. N. Peggs, A. J. Lewis, S. Oldfield. Design for a compact High-Accuracy CMM[J]. Annals of the CIRP, Vo1.48, No.1, pp.417-420,1999. 被引量：1
6Pril, Wouter O. Development of High Precision Probes for Coordinate Measuring Machines JR]. Eindhoven: Technische Universiteit, Eindhoven, 2002, PhD Thesis. 被引量：1
7H. Haitjema, et al. Development of a Silican-based Nanoprobe System for 3-D Measurements[J]. Annals of the CIRP, Vol. 50, No. 1, pp. 365-368, 2001. 被引量：1
