摘要
针对变截面微柱的局域电沉积制备开展了实验与仿真模拟,采用直径100μm的阳极针尖,通过改变连续提拉的步长制备了平均直径从92~293μm不等的自支撑微铜柱,探讨了提拉步长与铜柱直径的关系,进而提出了一种变步长局域电沉积方法,并成功制备了中部最大直径为164μm的变截面纺锤形微铜柱,同时利用COMSOL软件建立了数值仿真模型,分析了纺锤形铜柱形成的原因,可为基于局域电沉积法的复杂微结构制备提供参考。
Aiming to fabricate micropillar with variable cross-section,experiment and simulation studies were conducted.Free-standing copper micropillars with diameters varying from 92μm to 293μm were deposited under an anode needle with the diameter of 100μm by varying the withdrawal step length of the needle,and the relation between withdrawal step length and pillar diameter was discussed.As a result,a variable step local electrochemistry deposition method was proposed,and a spindle-shaped copper micropillar with a maximum diameter of 164μm in middle position was prepared.A numerical simulation model was established by adopting COMSOL software to analyze the reason for formation of spindle-shaped micropillar.The results in this paper may serve as a reference for the preparation of complex micro-structures by localized electrochemical deposition.
作者
坎标
徐盛松
丁建宁
顾迪
韩建
KAN Biao;XU Shengsong;DING Jianning;GU Di;HAN Jian(School of Mechanical Engineering,Changzhou University,Changzhou 213164,China;Jiangsu Collaborative Innovation Center for Photovoltaic Science and Engineering,Changzhou 213164,China;Changzhou High Technology Research Key Laboratory of Mould Advanced Manufacturing,Changzhou 213164,China;Research Center for Micro/Nano Science and Technology,Jiangsu University,Zhenjiang 212013,China)
出处
《电加工与模具》
2019年第3期54-58,共5页
Electromachining & Mould
基金
国家自然科学基金资助项目(51105046,51335002)
江苏省研究生科研创新计划项目(KYCX17_2087)
关键词
局域电沉积
纺锤形微铜柱
变步长
local electrochemistry deposition
spindle-shaped copper micropillar
variable step
