期刊文献+

Parylene薄膜及其在防潮保护中的应用 被引量:2

下载PDF
导出
摘要 简要介绍了Parylene薄膜制备方法,及其优良的力学性能、耐溶剂性及水汽与气体阻隔性能,归纳了近年来其在高活性材料以及文物图书档案防潮保护中的研究进展。
出处 《科技与创新》 2019年第1期142-143,146,共3页 Science and Technology & Innovation
  • 相关文献

参考文献5

二级参考文献30

  • 1宋云乾.Parylene真空沉积工艺及其应用[J].空载雷达,2005(2):80-82. 被引量:4
  • 2Jeffrey B Fortin. Poly-Para-Xylylene Thin Films: A Study of the Deposition Chemistry, Kinetics, Film Propertiles, and Film Deposition Stability[D]. New York: Rensselaer Polytechnic Institute, 2001. 被引量:1
  • 3Zhang X, Dabral S, Chiang C, et al. Crystallinity of parylene-n affecting its use as an ILD in submicron integrated circuit techlonogy [J]. The Solid Films, 1995, 270: 508-511. 被引量:1
  • 4Toon Y S, Park HY, Lim YC, et al. Effects of parylene buffer layer on flexible substrate in organic light emitting diode[J]. The Solid Films, 2006, 513: 258-263. 被引量:1
  • 5He Xiyuan, Zhang Fujia, Zhang Xu. Effects of parylene layer on high power light emitting diodes[J].Applied Surface Science, 2009, 256: 6-11. 被引量:1
  • 6Konstantin I Pokhodnya, Michael Bonner, Joel S. Miller.Parylene Protection Coatin-gs for thin film V[TCNE]x Room temperature Magnets[J]. Chem Mater, 2004,16: 5114-5119. 被引量:1
  • 7Seshadri Ganguli, Hemant Agrawal, Wang Bin, et al. McDonald. Improved grow-th and thermal stability of Parylene films[J]. Journal of Vacuum Science and Technology A, 1997, 15 ( 6 ) : 3138-3142. 被引量:1
  • 8Fortin J B, Lu TM. A Model for the Chemical Vapor Deposition of Poly(xy-xylylene) (parylene) Thin films[J]. Chem Mater, 2002, 14: 1945-1949. 被引量:1
  • 9Charlson E M, Charlson E J, Roya Sabeti. Temperature Selective Deposition of Paryl-ene-C[J]. IEEE Transactions on Biomedical Engineering, 1992, 2 ( 39 ) : 202-206. 被引量:1
  • 10Gordon P Spellman, James F Carley, Lawrence A Lopez. Vacuum Deposition of Pary-lene Films:Influence of Process Factors and Baffling on Film-Thickness Distribution[J]. Jour-nal of Plastic Film and Sheeting, 1999, 15 : 308-328. 被引量:1

共引文献21

同被引文献24

引证文献2

二级引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部