摘要
随着显示行业高端消费品的发展要求,LTPS成为目前显示领域炙手可热的先进技术,但是由于国外技术封锁,国内全部依赖进口,因而我们必须自主研发,提升综合竞争力。本文基于平板显示最新发展动态和研发热点,综述了高分辨率LCD/OLED显示产品所用LTPS制程工艺种类与特点,以及LTPS制程工艺对玻璃基板的理化性能要求,其中,玻璃基板耐热性、热膨胀系数、紫外透过率、弹性模量是十分关键的技术指标;论述了溢流法生产工艺和浮法生产工艺所生产的LTPS玻璃基板的优势与劣势;总结了美国和日本开发满足LTPS制程工艺的玻璃基板产品状况;讲述了我国尚未形成技术和产业突破,亟须加大对LTPS制程工艺的玻璃基板的研发投入和产业探索的现状。
The purpose of this paper is to summarize the types and characteristics of LTPS process technology used in high resolution LCD/OLED display products,as well as the physics and chemistry performance requirements of LTPS process technology on glass substrates.The most critical technical indicators are heat resistance,thermal expansion coefficient,UV transmittance,and elastic modulus.What’s more we compared and analyzed the advantages and disadvantages of LTPS glass substrates produced by overflow process and float process.Then we summarized the state of the glass substrate products developed by the United States and Japan to meet the LTPS process.The research and development status of glass substrate in LTPS process in China was described.It is urgent to increase investment in research and development and industrial exploration.
作者
田英良
胡春明
张广涛
王为
陈鑫鑫
李俊杰
TIAN Yingliang;HU Chunming;ZHANG Guangtao;WANG Wei;CHEN Xinxin;LI Junjie(School of Materials Science and Engineering, Beijing University of Technology, Beijing 100124;China Optics and Optoelectronics Industry Association LCD Association, Beijing 100015;Technology Center of Dongxu Group Co., Ltd., Beijing 100036)
出处
《材料导报》
EI
CAS
CSCD
北大核心
2018年第A02期73-79,共7页
Materials Reports
基金
国家重点研发计划(2017YFB0310201-04)
