摘要
光波导封装等领域对拥有大行程、高精度以及高分辨率的微位移平台有大量需求,在研究微位移平台的过程中设计了一种双铰链导向式非共振压电直线电机。简述了电机的工作原理,完成了电机的结构设计,制作出电机的样机并完成相关的实验,实验设备主要有信号发生器、功率放大器、示波器和激光位移传感器等。实验表明,电机最大速度达到10.36mm/s,分辨率达到0.3μm,理论最大输出推力达到8.33N,电机设计达到预期目的。
Micro position platform with a long traveling stroke and a high resolution are greatly required in modern manufacturing industry such as optical waveguide packaging.A non-resonant piezoelectric linear motor is designed for a micro position platform.The principle of operation is briefly introduced,and a prototype is fabricated.The experimental equipments include a signal generator,apower amplifier,a digital phosphor oscilloscope and a laser displacement sensor.The experiment results show that the maximum speed of the motor can reach up to 10.36 mm/s with 0.3μm resolution,and the theoretical maximum thrust force of the motor is as 8.33 N,which satisfies the application requirements of the micro position platform.
作者
王道智
黄卫清
孙梦馨
许文运
卢倩
陈西府
王寅
WANG Daozhi;HUANG Weiqing;SUN Mengxin;XU Wenyun;LU Qian;CHEN Xifu;WANG Yin(State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing,210016,China;College of Mechanical and Electric Engineering,Guangzhou University,Guangzhou,510006,China;School of Mechanical Engineering,Nanjing Institute of Technology,Nanjing,211167,China;School of Mechanical Engineering,Yancheng Institute of Technology,Yancheng,224051,China;College of Mechanical Engineering and Automation,Huaqiao University,Xiamen,361021,China)
出处
《振动．测试与诊断》
EI
CSCD
北大核心
2018年第6期1103-1107,1287,共6页
Journal of Vibration,Measurement & Diagnosis
基金
国家自然科学基金资助项目(51375224
51405420)
江苏省自然科学基金资助项目(BK20140474)
关键词
非共振
压电直线电机
压电叠堆
柔性铰链
non-resonant
piezoelectric linear motor
piezoelectric stack
flexible hinge
