摘要
通过建立数值模型,分析了垂直腔面发射激光器相干耦合阵列单元数量、单元间距、单元间相位差对光束质量及偏转角度的影响.仿真结果表明,单元数量越多,发散角越小;单元间距越小,旁瓣强度越小;单元间相位差越大,偏转角度越大.因此,设计相干阵列时,需要尽量减小单元间距,增大阵列规模,实现单元间大相位差的控制.实验制备了3单元相干耦合阵列,通过分离电极实现了单元注入电流的独立控制以及单元间相位差的控制,最终实现二维方向上的光束操控.
The beam quality and deflection angle of vertical cavity surface emitting laser arrays dependent on element number,separation and relative phase difference were analyzed via numerical modeling analysis.According to simulated results,the divergence angle of the array varies inversely with the number of array elements.The smaller the element separation,the smaller the intensity of side lobes.The larger the phase difference between the elements,the larger the deflection angle.Therefore,it is necessary to decrease element separation,increase array scale and increase phase difference between elements for designing the coherent vertical cavity surface emitting laser arrays.In addition,3-element vertical cavity surface emitting laser arrays were designed and fabricated.Two-dimensional beam steering was achieved successfully via separate contacts which can control current injection into each element to control phase difference between elements.
作者
许坤
王海丽
王献立
杜银霄
荀孟
XU Kun;WANG Hai-li;WANG Xian-li;DU Yin-xiao;XUN Meng(Zhengzhou University of Aeronautics,College of Science,Zhengzhou 450046,China;Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China)
出处
《光子学报》
EI
CAS
CSCD
北大核心
2019年第1期121-127,共7页
Acta Photonica Sinica
基金
国家自然科学基金(Nos.61274012
51472221)
国家自然科学基金青年基金(Nos.61704156
61804175
11704344)
中国博士后科学基金会与中国科学院联合资助优秀博士后项目(Nos.29Y7YBSH0001
90Y7BSH14001)
中国博士后科学基金(No.90Y7BSH34001)
河南省高等学校重点科研项目(No.17A510019)~~
关键词
半导体光电器件
垂直腔面发射激光器
相干耦合阵列
光束偏转
质子注入
Semiconductor optoelectronic devices
Vertical cavity surface emitting laser
Coherently coupled array
Beam steering
Proton implantation
