摘要
自动检测系统需要在没有人工干预的情况下完成待测基片扫正以及自动找到首测点进行起测的功能,若图像对准系统不能稳定工作,设备的整体运行效率就很受影响。通过对自动检测系统图像对准方式的研究,提出了用几何匹配的方法来代替之前的灰度匹配,并且改进了扫正和寻找首测点的方法,提高了整机系统的稳定性和运行效率。
The Automatic detection system(ADS)needs to scan the substrate and find the first measuring point automatically without manual intervention.If the image alignment system can't work stably,the overall operating efficiency of the equipment will be affected.In this paper,a geometric matching method is proposed to replace the previous gray-scale matching by researching the image alignment method of the Automatic detection system.The method of sweeping and searching the first measuring point is improved,and the stability and operation efficiency of the whole system are improved.
作者
左宁
胡晓霞
ZUO Ning;HU Xiaoxia(The 45^th Research Institute of CECT,BeiJing 100176,China)
出处
《电子工业专用设备》
2018年第6期41-46,共6页
Equipment for Electronic Products Manufacturing
关键词
自动检测系统
图像对准
几何匹配
Automatic detection system
Image alignment
Geometric matching
