摘要
文章研究绝对式光栅尺测量精度的影响因素,探索提高绝对式光栅尺测量精度的补偿算法。通过分析绝对式光栅尺测量精度的影响因素设计出绝对式光栅尺测量精度检测平台,在该平台上进行多次精度测量,得到误差曲线;根据误差曲线的特性,依次采用一次线性补偿,分段线性补偿和基于径向函数的神经网络补偿算法进行修正,并写入到绝对式光栅尺读数头内。从实验结果显示,绝对式光栅尺经过一次线性算法补偿后,精度提高到2.8μm,经过分段线性算法补偿后精度提高到1.08μm,经过基于径向函数的神经网络算法补偿后精度可提到0.65μm。表明以上三种算法都能达到对绝对式光栅尺测量精度进行补偿目的,对绝对式光栅尺精度的提高具有较大意义。
This paper studies the influencing factors of the accuracy of absolute linear encoder measurement,and explores the compensation algorithm to improve the accuracy of absolute linear encoder measurement.Through the analysis of the influence factors,the measurement platform is designed,and the error curve is obtained on this platform by performing multiple precision measurements.Based on the characteristics of the error curve,the linear compensation,the piecewise linear compensation and the neural network compensation algorithm based on the radial function are used to correct the error curve and write to the absolute linear encoder’s reading head.The experimental results show that the precision of the absolute linear encoder is improved to±2.8μm after a linear algorithm compensation,and the precision is improved to±1.08μm after the compensation of the piecewise linear algorithm.,and after the compensation of the neural network algorithm based on the radial function Mention,the precision improved to±0.65μm.It is shown that the above three algorithms can achieve the purpose of compensating the accuracy of absolute linear encoder,and it is of great significance to improve the accuracy of absolute linear encoder.
作者
李彬
王晗
陈新度
游杰
LI Bin;WANG Han;CHEN Xin-du;YOU Jie(College of Mechanical Engineering,Guangdong University of Technology,Guangzhou 510641,China)
出处
《组合机床与自动化加工技术》
北大核心
2018年第7期38-42,共5页
Modular Machine Tool & Automatic Manufacturing Technique
基金
广东省科技计划项目(协同创新与平台环境设计):(2015B010102014)
"广东特支计划"科技青年拔尖人才项目(2014TQ01X212)
广东省高等学校优秀青年教师培养计划(YQ2015056)
广东省自然科学基金(2015A030312008)
关键词
绝对式光栅尺
测量精度
误差补偿
absolute linear encoder
measurement accuracy
error compensation
