摘要
To satisfy the demand on dynamic performance and load characteristics of piezoelectric actuators in aeronautics and astronautics fields,a novel 2Dpiezo-nanopositioning stage utilizing a triangle amplifier mechanism is proposed.The stage is driven by piezoelectric rhombic units in both X and Ydirections,which is composed of four piezoelectric stacks.Theoretical static model develops the relationships among output force,displacement,static stiffness and the structure parameters of the platform.The experimental results of the prototype show that the output performances in X and Ydirections are similar and both of them are within an 8% deviation from the theoretical values.The stroke of the stage reaches 41.6μm and 42.9μm in Xand Ydirections,respectively,and is directly proportional to the amplitude of the input sinusoidal voltage 10 Hz.Moreover,the nano-positioning stage is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic,whose minimum output displacement step is 50 nm.
To satisfy the demand on dynamic performance and load characteristics of piezoelectric actuators in aeronautics and astronautics fields,a novel 2Dpiezo-nanopositioning stage utilizing a triangle amplifier mechanism is proposed.The stage is driven by piezoelectric rhombic units in both X and Ydirections,which is composed of four piezoelectric stacks.Theoretical static model develops the relationships among output force,displacement,static stiffness and the structure parameters of the platform.The experimental results of the prototype show that the output performances in X and Ydirections are similar and both of them are within an 8% deviation from the theoretical values.The stroke of the stage reaches 41.6μm and 42.9μm in Xand Ydirections,respectively,and is directly proportional to the amplitude of the input sinusoidal voltage 10 Hz.Moreover,the nano-positioning stage is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic,whose minimum output displacement step is 50 nm.
基金
supported partly by the Project on Integration of Industry,Education and Research of China Aviation Industry Corp.(No.CXY2013NH09)
the National Natural Science Foundation of China(No.51375224)
