摘要
在1034探针台中,驱动承片台在X-Y方向运动的平面电机功率放大部件是该设备的核心部件,其性能的好坏直接关系到探针台的性能。本文拟从简述平面电机的原理入手,对该功放部件的性能、测试方法和维修作一讨论。
For the 1034 wafer probing station the power amplifier unit in the planar motor driving the wafer carrier to move in X and Y direction is a key unit. Its performance directly influences upon the function of the wafer probing station. Beginning with a brief introduction to the principle of the planar motor, the performance, test, and maintenance are discussed in the paper.
出处
《微电子技术》
2002年第5期43-45,64,共4页
Microelectronic Technology
