摘要
选择电磁激励硅基MEMS谐振式压力传感器作为测试对象,配套了相应的测试设备,设计了一种可以快速测试传感器频率的基于自适应周期的同步测频方法。选择双谐振器结构来配置传感器芯体,以STM32f3系列单片机构建频率测试和压力解算系统。利用McU来实现同步采集传感器的两路频率信号和解算压力值的过程,同时利用RS232通信模块输出传感器的压力值。测试结果得到:以25 ms作为采样条件时可以控制压力输出波动在±5 Pa以内。升温阶段的传感器输出压力和标准器之间的偏差都在±30 Pa以内,符合传感器的测试要求。
The electromagnetic excitation silicon MEMS resonant pressure sensor is selected as the test object,and the corresponding test equipment is matched.A step frequency method based on adaptive period is designed,which can quickly test the frequency of the sensor.The dual resonator structure is selected to configure the sensor core,and STM32f3 series single-chip microcomputer is used to construct the frequency test and pressure calculation system.McU is used to realize the process of synchronous acquisition of two-channel frequency signals of the sensor and decompression of pressure value,and RS232 communication module is used to output the pressure value of the sensor.The test results show that the pressure output fluctuation can be controlled within 5 Pa with 25 ms as the sampling condition.The deviation between the sensor output pressure and the standard device in the heating stage is within 30 Pa,which meets the test requirements of the sensor.
作者
郑振峰
王浅安
Zheng Zhenfeng;Wang Qian′an(Shaanxi Vocational and Technical College of National Defense Industry,Xi′an 710300,China;Beijing Jingwei Hengrun Technology Co.,Ltd.Beijing 100036,China)
出处
《电子测量技术》
2019年第15期79-82,共4页
Electronic Measurement Technology
关键词
传感器
频率测量
频率自适应
响应时间
sensor
frequency measurement
frequency adaptive
response time
