摘要
考虑有滞留时间约束的集束型晶圆制造装备调度问题,其调度要同时考虑晶圆加工排序和机械手搬运作业排序,给出了基于图论的分支定界算法,并采用最长路径方法确定调度目标。仿真实验结果验证了算法的有效性。
This paper addresses the cluster tools scheduling problem with residency time constraints for wafer fabrication. Thescheduling object is to determine both wafer input sequence and transfer robot task sequence. A branch and bound algorithm basedgraph theory is proposed, and the longest path method is to determine the scheduling object. Experimental example shows that theproposed method is effective.
出处
《电脑知识与技术》
2018年第3X期242-243,共2页
Computer Knowledge and Technology
基金
大连外国语大学2017年大学生创新创业训练计划项目(201710172000010)
关键词
集束型装备
分支定界算法
晶圆制造
Cluster Tools
Branch and bound algorithm
Wafer fabrication
