摘要
为了减小电磁式时栅位移传感器的原始误差,提出了一种基于平面线圈的基波脉振磁场构造方法。通过研究现有电磁式时栅磁场构造方法和平面线圈磁场分布特性,利用各次谐波畸变率THD(Total Harmonic Distortion)最小的优化算法,得到平面线圈最优化布置参数,并且在数值分析和有限元分析软件中得到了验证。根据这些参数设置,设计了基于多匝方形平面线圈的新型电磁式时栅位移传感器。在150 mm量程内,新型时栅原始误差为-32μm^23μm,较现有电磁式时栅位移传感器减小了42.3%。
In order to reduce the original error of electromagnetic time-grating displacement sensor,a method based on planar coils for building the fundamental wave of pulsating magnetic field is proposed. Through the study of magnetic field generating method for traditional time-grating sensor and distribution of magnetic field generated by planar coils,an optimization algorithm that is restricted by Total Harmonic Distortion is presented. The optimal parameters of planar coils construction are obtained and verified in MATLAB and ANSOFT. Based on the structure parameters,a novel electromagnetic time-grating sensor with planar coils is designed. Calibrated by the optical grat-ing,the original error of the novel sensor is from-32μm to 23μm,42.3%lower than traditional time-grating sensor.
出处
《传感技术学报》
CAS
CSCD
北大核心
2015年第10期1476-1481,共6页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(51405049)
重庆理工大学研究生创新基金项目(YCX2014206)
关键词
基波脉振磁场
平面线圈
谐波畸变率
电磁式时栅
pulsating magnetic field of fundamental wave
the planar coil
total harmonic distortion
electromagnetic time-grating sensor
