摘要
介绍了全息激光光学检漏的工作原理,比较全面地总结了全息光学检漏的技术特点,以及集成电路生产企业引入全息光学检漏的意义。利用光学检漏技术,解决了某批器件采用氦质谱检漏时存在"误判"的问题,证明了光学检漏技术测量结果可靠,可以提升生产效率和质量控制水平,在各方面均优于氦质谱和氟油气泡检漏。
The working principle of holographic laser optical leak detection is introduced, and the technical characteristics of holographic optical leak detection and the meaning of the application of the leak detection technique in integrated circuit manufacturing enterprises are summarized comprehensively. By using optical leak detection technology, the problem of misjudgment when using helium mass spectrometer for leak detection in a batch of devices is solved. And through the application example in production, it is proved that the measurement results of optical leak detection technology is realiable, and it can improve the production efficiency and the quality control level. Besides, it is superior to helium mass spectrometry and fluorine oil bubble detection in all aspects.
作者
冯小成
贺晋春
荆林晓
井立鹏
李洪剑
FENG Xiaocheng;HE Jinchun;JING Linxiao;JING Lipeng;LI Hongjian(Beijing MXTronics Corporation,Beijing 100076,China)
出处
《电子产品可靠性与环境试验》
2018年第4期7-11,共5页
Electronic Product Reliability and Environmental Testing
关键词
光学检漏
漏率
密封元器件
气密性
optical leak detection
leak rate
hermetic device
air tightness
