摘要
中子深度剖面分析(Neutron depth profiling,NDP)技术在半导体生产、离子注入研究、材料科学等领域有广泛应用。为了探究NDP能谱分析中模拟软件的一致性与可靠性,本文对比了SRIM、MCNP、FLUKA和GEANT4等软件模拟NDP的结果;对比分析了4款模拟软件模拟的α粒子能谱,并以美国国家标准与技术研究院(National Institute of Standards and Technology,NIST)标准物质SRM2137实测谱为标准对模拟谱进行评价。结果表明:4款模拟软件所模拟的α能谱在2μm厚晶体硅层内峰位能量一致性较好;MCNP模拟的半高宽和峰位结果优于FLUKA和GEANT4的模拟结果。
[Background] Neutron depth profiling （NDP） method is widely used in semi-conductor production, ion implantation research, material science and other fields. [Purpose] This study aims to explore the reliability of simulation software in NDP energy spectrum analysis, and compare the results of simulating NDP by SRIM, MCNP, FLUKA, and GEANT4. [Methods] First of all, the differences of four software in simulation for alpha spectrum are discussed. Then, the experimental alpha spectrum of National Institute of Standards and Technology （NIST） standard is used to evaluate the simulation results of MCNP, FLUKA and GEANT4 in NDP analysis. [Results] The simulation results of alpha spectrum show that the peak position of alpha spectrum is close to each other when the thickness of silicon is less than 2 μm. [Conclusions] Three software, i.e., MCNP, FLUKA and GEANT4, could be used to simulate the alpha spectrum in NDP analysis whilst the MCNP achieves better accurate full width at half maximum （FWHM） and the peak position of alpha spectrum.
作者
徐僳
张庆贤
何庆驹
吴涛
张罡
石丛
孙坤
肖云龙
XU Su;ZHANG Qingxian;HE Qingju;WU Tao;ZHANG Gang;SHI Cong;SUN Kun;XIAO Yunlong(College of Nuclear Technology and Automation of Engineering,Chengdu University of Technology,Chengdu 610059,China)
出处
《核技术》
CAS
CSCD
北大核心
2018年第9期16-20,共5页
Nuclear Techniques
基金
国家自然科学基金(No.41774190)
四川省科技计划项目(No.2015GZ0272)
四川省教育厅科技项目(No.17ZA0033)资助~~
