摘要
采用共溅射及分步溅射方法在涂钼的钠钙玻璃衬底上分别形成金属预制层,先后在低温及高温下对金属预制层进行合金后硫化,制备了铜锌锡硫（Cu2Zn SnS4,CZTS）薄膜。研究了薄膜的晶体结构、表面和截面形貌、元素组分、薄膜中的相纯度及元素的化学状态。结果表明：共溅射预制层得到的CZTS薄膜的表面及截面形貌优于分步溅射预制层得到的CZTS薄膜。用紫外-可见分光光度计与Hall测试系统表征了CZTS薄膜的光电特性,发现在200℃退火15 h能有效降低CZTS薄膜的缺陷态密度,增加CZTS薄膜中的载流子迁移率和扩散系数。研究结果表明,采用共溅射制备CZTS薄膜太阳电池性能优于分步溅射法,且经过退火处理的CZTS薄膜制备的电池特性均得到有效提高。基于分步溅射法制备的CZTS吸收层制备的电池开路电压为722 m V,短路电流密度为11.2 mA/cm2,最高转换效率为3.22%;基于共溅射法制备的CZTS吸收层制备的电池开路电压为637 m V,短路电流密为15.0 mA/cm2,最高转换效率为3.88%。
The different metallic preformed layers were deposited on Mo-coated soda lime glass（SLG）substrate by co-sputtering and separated-sputtering methods,respectively.The two kinds of preformed layers were alloyed at a low temperature and sulfurized at a high temperature sequentially to form the Cu2Zn Sn S4（CZTS）films.The structural,morphological,compositional features,purity of phase and chemical information of the CZTS films were investigated.The results show that the morphologies of surface and cross sections of the CZTS films based on co-sputtering are better than those based on separated-sputtering.The optical-electrical properties of the films were characterized by ultraviolet-visible spectroscopy and Hall system.After annealing at 200℃for 15 h,the defect state density of CZTS film decreases and the mobility and diffusion coefficient of carriers in CZTS both improve.It is also indicated that the performance of the CZTS film solar cells based on co-sputtering is better than that based on separated-sputtering,and the performance of the CZTS film solar cells is improved after annealing.The maximum conversion efficiency of the fabricated CZTS film solar cell using separated-sputtering method is 3.22%with an open-circuit voltage of 722 m V and a short-circuit current density of 11.2 m A/cm2,and the maximum conversion efficiency of the fabricated CZTS film solar cell with co-sputtering method is3.88%with an open-circuit voltage of 637 m V and a short-circuit current density of 15.0 m A/cm2.
作者
徐信
蒋志
李志山
陆熠磊
王书荣
XU Xin, JIANG Zhi, LI Zhishan, LU Yilei, WANG Shurong(Yunnan Normal University, Key Laboratory of Rural Energy Engineering in Yunnan, Kunming 650500, Chin)
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2018年第7期1011-1020,共10页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金(61167003)
西南地区可再生能源研究与开发协同创新中心(05300205020516009)项目资助
关键词
铜锌锡硫薄膜
共溅射
分步溅射
太阳电池
硫化
CuZnSnS4 thin film
co-sputtering
separated-sputtering
solar cell
sulfurization
