摘要
为了消除系统外产生的误差因素,提高液体静压导轨的定位精度,从而使超精密数控机床的加工精度得到提高,搭建UMAC运动控制器、TRUST线性驱动器以及上位机的硬件平台。通过雷尼绍激光干涉仪,测量静压导轨在全闭环控制下的定位精度,建立误差补偿表,利用UMAC定位精度补偿功能对液体静压导轨定位精度进行实时软件补偿。测试结果表明:基于UMAC误差补偿功能使液体静压导轨的定位精度得到了有效提高,定位精度达到±0.6μm,最终结果达到预期效果。
The purpose of the paper is to improve the positioning accuracy of the hydrostatic guideway in order to eliminate the error factor generated by the system. Therefore,the machining precision of the ultra-precision CNC machine is improved and the hardware platform of UMAC motion controller, TRUST linear actuator and upper computer is built. A table of positioning errors is created by adopting the detecting method of Renishaw laser intefferometer, which is used to detect and analyze the hydrostatic guideway＇s positioning error under the closed-loop control. Based on this, the positioning accuracy of hydrostatic guideway is achieved by using UMAC to carry out real-time software compensation on the positioning error. The result of the test indicates that UMAC error compensation function can effectively improve the positioning accuracy of hydrostatic guideway. The positioning accuracy is up to ~0.6 ~tm, indicating that the expected effect is achieved.
作者
刘震
刘强
周富林
邓利松
LIU Zhen;LIU Qiang;ZHOU Fulin;DENG Lisong(School of Mechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)
出处
《机械》
2018年第7期72-76,共5页
Machinery
基金
广东省应用型科技研发专项资金项目(2015B090921007)
关键词
UMAC
静压导轨
激光干涉仪
定位精度
误差补偿
UMAC
hydrostatic guideway
laser interferometer
positioning accuracy
error compensation
